Application of V2O5 in thin film microbatteries prepared by RF magnetron sputtering

摘要：

The polycrystalline V2O5 films as the anode in V2O5 /LiPON /LiCoO2 lithium microbattary were prepared by RF magnetron sputtering system. The V2O5 films’ crystal structures, surface morphologies and composition were characterized and analyzed by X-ray diffraction (XRD), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). The microbatteries were fabricated by micro electro-mechanical system (MEMS) technology. The battery active unit area is 500μm×500μm, and the thickness of V2O5, LiPON and LiCoO2 films was estimated to be 200, 610, and 220nm, respectively. The discharge volumetric capacity is between 9.36μAhcm-2μm-1 and 9.63μAhcm-2μm-1 after 40 cycles.

关键词： V2O5 RF magnetron sputtering microscale lithium batteries MEMS technology

作者: Liangtang Zhang Jie Song Quanfeng Dong Suntao Wu

作者单位: Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen, China, 361005 Pen Tu College of Chemistry & Chemical Engineering, Xiamen University, Xiamen, China, 361005 Pen Tung Sah MEMS Research Center, Xiamen University, Xiamen, China, 361005

会议类型: 国际会议

会议名称: 第二届多功能材料与结构国际会议

会议地点: 青岛

会议语种:英文

页码: 931-934

在线出版日期: 2009-10-09（万方平台首次上网日期，不代表论文的发表时间）