Growth of Carbon Nanocoils using Chemical Vapor Deposition
We present the synthesis of carbon nanocoils using the chemical vapor deposition technique with metal catalysts on silicon substrates. The optimum synthesis conditions and coil geometry are summarized. The coils have distribution of the outside diameter of 300 nm to 1200 nm, wire diameter of 150 nm to 400 nm and the pitch of the coil of 150 nm to 1200 nm. Applications of the developed carbon nanocoils can be electro-mechanical sensing and the electro-magnetic insulation.
carbon nano-coils chemical vapor deposition synthesis
C. C. Su Y. L. Hsieh S. H. Chang
Department of Mechanical Engineering, National Taiwan University 1, Section 4, Roosevelt Rd., Taipei Department of Mechanical Engineering, National Taiwan University 1, Section 4, Roosevelt Rd., Taipei
国际会议
青岛
英文
1851-1854
2009-10-09(万方平台首次上网日期,不代表论文的发表时间)