Micro etching method inside microchannels
Microfluidic devices basically operate at low Reynolds numbers, which leads entirely laminar features of the fluid in microchannels. This paper presents a novel micro fabrication method based on the laminar characteristics of microscale flow. This new micro fabrication process can be used for high aspect ratio etching inside a micro channel on isotropic substrate materials and the features of the micro structures, which are patterned with this fabrication method, are determined by the flow parameters. A new kind of Glass-PDMS microfluidic chip with an impermanent bonding is used for the convenience of observing and measurement. The effects of flowrates on etching rate and the micro topography were analyzed. The quantitative conclusion described in this letter, is required for understanding the features of surface chemical reaction inside microchannels.
Microfluidics Etching Laminar flow Micro fabrication
Yi Zheng Haibo Xie Xin Fu Huayong Yang
The State Key Laboratory of Fluid Power Transmission and Control, Zhejiang University, Hangzhou, China
国际会议
杭州
英文
995-999
2009-04-08（万方平台首次上网日期，不代表论文的发表时间）