Controlling the Tip-sample Force of Contact Mode Atomic Force Microscopes Using PI-like Fuzzy Control Technique
In this study, a PI-like fuzzy logic controller is designed to accommodate the nonlinear behaviors in the constant tip-deflection systems for contact mode AFM. By exploiting the fuzzy logic structure of the controller, heuristic knowledge is incorporated and results in a non-linear controller with improved transient performance over traditional PI controllers. Using the proposed controller allows the cantilever tip to track sample surface rapidly and accurately. The rapid tracking response facilitates us to observe high aspect ratio micro structure accurately and quickly. Additionally, continuously manual gain tuning by trial and error in commercial AFMs is alleviated. In final, the proposed PI-like fuzzy controller shows better performance than traditional PI controllers.
Atomic Force Microscope Contact mode PI-like fuzzy controller Constant tip-sample force
Yuanjay Wang Jianjay Huang Sunghung Shih
Department of Electrical Engineering, Tungnan University, Taiwan
国际会议
The 22nd China Control and Decision Conference(2010年中国控制与决策会议)
徐州
英文
3713-3718
2010-05-26（万方平台首次上网日期，不代表论文的发表时间）