Research on Electrostatic Micropump Pull-in Phenomena Based On Reduced Order Model

摘要：

To investigate the pull-in phenomenon of electro static micropump, the mechanical behavior of an electrostatic micropnmp employing a circular membrane is studied using a reduced order model (ROM) of membrane, which is constructed based on numerical calculation and mode superposition method. Comparing the results of ROM with the results calculated by 3D finite element model, it shows the ROM sped up computational cost without sacrificing the accuracy. In addition, the effects of different parameters such as initial gap, thickness, radius, residual stress on pull-in voltage and pull-in position are studied by the ROM, the obtained results provide an effective theoretical basis for the electrostatic micropump design and manufacture.

关键词： Pull-in Electrostatic Micropump Reduced order model(ROM) MEMS

作者: Wen-yao Liu

作者单位: Department of Mechanical Engineering NingBo Polytechnic College NingBo, China

会议类型: 国际会议

会议名称: 2010 International Conference on Intelligent Computation Technology and Automation(2010 智能计算技术与自动化国际会议 ICICTA 2010)

会议地点: 长沙

会议语种:英文

页码: 2324-2327

在线出版日期: 2010-05-11（万方平台首次上网日期，不代表论文的发表时间）