Fabrication and characterization of Polysilicon-based Clamped-Clamped filter

摘要：

The rapid growth of micromaching technology makes the miniaturized or integrated MEMS resonator or filter become possible. This paper reports on the fabrication and characterization of the polysilicon-based RF MEMS filter, comprised of the two clamped-clamped resonators coupled with the micro dimensions beam. The surface micromaching technology has been adopted to fabricate the clamped-clamped filter. The fabricating process and the optimization of the typical micromaching process for the MEMS RF filter are illustrated in detail. After the fabrication, the resonating characteristics are measured. The center frequency of 30 MHz of the micromechanical bandpass filter is demonstrated.

作者: Y. M. Zhao J. Ning G. W. Han C. W. Si F. H. Yang

作者单位: Research Center of Engineering for Semiconductor Integrated Technology, Institute of Semiconductors, Research Center of Engineering for Semiconductor Integrated Technology, Institute of Semiconductors,

会议类型: 国际会议

会议名称: China Semiconductor Technology International Conference 2010(中国国际半导体技术大会 CSTIC)

会议地点: 上海

会议语种:英文

页码: 91-95

在线出版日期: 2010-03-18（万方平台首次上网日期，不代表论文的发表时间）