Design and fabrication using Hot Embossing Lithography of a microfluidic chip for microsphere single-pass applications

摘要：

Polymer-based microfluidic chips are fabricated to demonstrate three-dimensional (3-D) spatial confinement of microspheres and fluids for microsphere single-pass biological applications and fluidic control. In this article, we report a novel fabrication process of a Poly(dimethylsiloxane) (PDMS) device by soft lithography, which involves creation of positive mold containing the sub-20 μm width microchannels microstructures that were fabricated by Hot Embossing Lithography (HEL). The microspheres with a diameter of 13～15 μm were injected directly into the inlet reservoirs and passed through one by one in the microchannels by the external pumps which has great potential for low-cost and more efficient detection and counting based on microspheres.

作者: Huaibo Qu Ruixia Yang Suying Yao Peng Gao

作者单位: College of Information Engineering, Hebei University of Technology,Tianjin 300401,China School of Electronic and Information Engineering, Tianjin University,Tianjin 300072,China

会议类型: 国际会议

会议名称: China Semiconductor Technology International Conference 2010(中国国际半导体技术大会 CSTIC)

会议地点: 上海

会议语种:英文

页码: 97-102

在线出版日期: 2010-03-18（万方平台首次上网日期，不代表论文的发表时间）