Recent Advances in Thermal Processing for c-Si Solar Cell Manufacturing
Thermal processing is an integral part of crystalline silicon (c-Si) solar cell manufacturing technology. It is often applied to achieve diffusion, annealing, oxidation, deposition, or reaction process steps in a production environment. This paper reports recent developments in thermal process technology that enable the industry to improve cell efficiency and manufacturing productivity for the standard c-Si cell technology. Especially, continuous inline thermal equipment is adopted in many critical c-Si cell fabrication stages, from emitter formation by dopant diffusion, contact formation by rapid thermal sintering of metallic pastes, to hydrogen annealing to rescue low-efficiency cells.
T. Bao Y. Guo L. Li X. Zheng F. Bottari
BTU International, 23 Esquire Rd, Billerica, MA 01826, USA
国际会议
China Semiconductor Technology International Conference 2010(中国国际半导体技术大会 CSTIC)
上海
英文
995-1000
2010-03-18（万方平台首次上网日期，不代表论文的发表时间）