Polysilicon Materials FBR Technology for Solar and Semiconductor Silicon
The chaotic nature of fluid flow within a fluidized bed reactor (FBR), the high surface area of the product which requires special handling to prevent contamination, the size of the reactors and the construction materials present significant engineering challenges, but, once overcome the benefits of the FBR polysilicon production are significant. FBR technology can used with either silane or TCS feed. In this paper, the reaction paths for silane conversion are discussed. Sophisticated predictive modeling and simulation capabilities allow optimization of both reactor design and operating conditions to maximize productivity and reduce reactor downtime. These attributes enable production of high purity polysilicon for both the solar and the semiconductor industries.
Graham R. Fisher Milind Kulkarni
MEMC Electronic Materials, Inc., St. Peters, MO63376, U.S.A.
国际会议
China Semiconductor Technology International Conference 2010(中国国际半导体技术大会 CSTIC)
上海
英文
1001-1006
2010-03-18（万方平台首次上网日期，不代表论文的发表时间）