Numerical Analysis of Oxygen and Carbon Transport in a Unidirectional Solidification Furnace
A global simulation of coupled oxygen and carbon transport in a unidirectional solidification furnace was carried out for accurate prediction of distributions of carbon and oxygen impurities in multicrystalline silicon material for solar cells. Both the gas flow and silicon melt flow were coupled each other. Five chemical reactions were taken into account during the transportation of the impurities.
B. Gao K. Kakimoto S. Nakano
Research Institute for Applied Mechanics, Kyushu University, Kasuga, Fukuoka 816-8580 JAPAN
国际会议
China Semiconductor Technology International Conference 2010(中国国际半导体技术大会 CSTIC)
上海
英文
1015-1020
2010-03-18(万方平台首次上网日期,不代表论文的发表时间)