Modeling of the 3D Unsteady Melt Flow in an Industrial-Scale Cz-Si Crystal Growth Using LES Method

摘要：

A computational model was presented for the 3D unsteady turbulent melt flow in an industrial-scale Cz-Si growth with Large Eddy Simulation (LES) method in curvilinear grids. The turbulent transport of momentum and heat in the melt was investigated. The turbulent nature of unsteadiness and threedimensionality of the melt flow was verified. Fluctuation of the thermal field was obviously observed in the melt region close to the melt-crystal interface.

作者: Xin Liu Lijun Liu Yuan Wang Koichi Kakimoto

作者单位: School of Energy and Power Engineering, Xian Jiaotong University, Xian, Shaanxi 710049, China School of Energy and Power Engineering, Xian Jiaotong University, Xian, Shaanxi 710049, China Stat Research Institute for Applied Mechanics, Kyushu University, Kasuga 816-8580, Japan

会议类型: 国际会议

会议名称: China Semiconductor Technology International Conference 2010(中国国际半导体技术大会 CSTIC)

会议地点: 上海

会议语种:英文

页码: 1035-1039

在线出版日期: 2010-03-18（万方平台首次上网日期，不代表论文的发表时间）