Analysis of Nonlinearities in Force-to-Voltage Conversion in Vibratory Microgyroscope
At present, the MEMS vibratory gyroscope is an extensively researched MEMS sensor. The vibratory gyroscope is used to measure the angular velocity of object, which is based on Coriolis effect, According to the working principle of this kind of gyroscope, the force to voltage is an important part conversion for realizing the role of the gyro. In the paper, we analyze the nonlinearities in force-to-voltage conversion, and conclude that the mechanical quadrature signal can form the limiting factor for the overall accuracy of the system.
vibratory microgyroscope mechanical quadrature synchronous demodulation nonlinearities force-to-voltage conversion MEMS
Shaohua Niu Shiqiao Gao
School of Mechatronical Engineering, Beijing Institute of Technology, 100081,China
国际会议
长沙
英文
551-554
2010-03-13（万方平台首次上网日期，不代表论文的发表时间）