会议专题

Design of The Optical Fiber MEMS Infrasound Sensor

An optical fiber infrasound sensor based on Microelectromechanical System (MEMS) is designed in this paper. Static performance of several sizes of membranes which are the core elements of the infrasound sensor are simulated with Finite Element modeling, and the results of strain gradients are shown. The relation expression between displacement of membrane and fight intensity is deduced. The value of every parameter which will be used during the sensor fabrication through numerical simulation is ascertained, such as the radius of optical fiber, the membrane thickness, the size of membrane.

MOEMS infrasound sensor intensity modulatio Electro-Optical Technolog

Jiang Bingli Yang Kuntao Wang Jiangan

College of Optoelectronic Science & Engineering Huazhong University of Science & Technology Wuhan, 4 Electronic Engineering Institute Naval University of Engineering Wuhan,430033, China

国际会议

2010 International Conference on Measuring Technology and Mechatronics Automation(ICMTMA 2010)(2010年检测技术与机电自动化国际会议)

长沙

英文

1049-1051

2010-03-13(万方平台首次上网日期,不代表论文的发表时间)