Design of The Optical Fiber MEMS Infrasound Sensor
An optical fiber infrasound sensor based on Microelectromechanical System (MEMS) is designed in this paper. Static performance of several sizes of membranes which are the core elements of the infrasound sensor are simulated with Finite Element modeling, and the results of strain gradients are shown. The relation expression between displacement of membrane and fight intensity is deduced. The value of every parameter which will be used during the sensor fabrication through numerical simulation is ascertained, such as the radius of optical fiber, the membrane thickness, the size of membrane.
MOEMS infrasound sensor intensity modulatio Electro-Optical Technolog
Jiang Bingli Yang Kuntao Wang Jiangan
College of Optoelectronic Science & Engineering Huazhong University of Science & Technology Wuhan, 4 Electronic Engineering Institute Naval University of Engineering Wuhan,430033, China
国际会议
长沙
英文
1049-1051
2010-03-13(万方平台首次上网日期,不代表论文的发表时间)