Dynamic Characterization Analysis System Based on Optical Measuring Methods

摘要：

Optical measuring methods are usually characteristic of fast, non-contact and high precision. This paper introduces a dynamic characterization analysis system of micro-electromechanical systems (MEMS) based on optical measuring methods. The system employed stroboscopic illumination, optical flow technology and microscopic interferometry to realize the measurement of in-plane and out-of-plane motions of a micro-machined lateral resonator. The experiments demonstrate the effectiveness of the system. This research can provide reliable experimental data feedback to the process of design and fabrication of movable MEMS devices.

关键词： Micro-electromechanical systems (MEMS) dynamic characterization optical flow technology microscopic interferometry stroboscopic illumination

作者: BIAN Yan GUO Tong

作者单位: Department of Automation Engineering Tianjin University of Technology and Education Tianjin, China State Key Laboratory of Precision Measuring Technology and Instruments Tianjin University Tianjin, C

会议类型: 国际会议

会议名称: 2010 International Conference on Measuring Technology and Mechatronics Automation(ICMTMA 2010)(2010年检测技术与机电自动化国际会议)

会议地点: 长沙

会议语种:英文

页码: 1171-1174

在线出版日期: 2010-03-13（万方平台首次上网日期，不代表论文的发表时间）