Equivalent Electrical Modeling and Simulation of MEMS Comb Accelerometer

摘要：

An equivalent electrical model of the MEMS comb accelerometer is presented in this paper, including the readout interface circuit. The accelerometer has only one proof mass, symmetrically suspended by four cantilevers. The displacement change of the proof mass is converted to the change of differential capacitance between the proof mass and adjacent fixed electrodes. In order to establish the mechanical characteristics of the accelerometer in this equivalent electrical model, we use the so-called analog behavioral modeling library to describe the mechanical part of the system. Through combining the electrical model of the acceleration sensor and the readout interface circuit, we get the system-level model of the MEMS comb accelerometer. The simulation results are in good accordance with theoretical analysis.

关键词： Microaccelerometer Equivalent circuit model Capacitive sensing

作者: Chen Hao Chen Min Zhao Wenjing Xu Limei

作者单位: Institute of Astronautics & Aeronautics University of Electronic Science and Technology of China Chengdu, PR China

会议类型: 国际会议

会议名称: 2010 International Conference on Measuring Technology and Mechatronics Automation(ICMTMA 2010)(2010年检测技术与机电自动化国际会议)

会议地点: 长沙

会议语种:英文

页码: 1241-1244

在线出版日期: 2010-03-13（万方平台首次上网日期，不代表论文的发表时间）