Two-Dimensional Model and Simulation of Enhanced Sensitivity PIN Photodiode Detector for 3D Imager

摘要：

In this paper, a kind of enhanced sensitivity PIN photodiode detector is proposed applying for 3D image sensor.Based on 130nm CMOS image sensor process, the two dimensional model of both traditional and enhanced sensitivity has been built up for simulation. Process and electrical parameters are simulated and extracted by using physical modeling packages SILVACO. The device simulation results show that high sensitivity and wide spectral response of proposed PIN photodiode is better than that of traditional PIN photodiode.

关键词： Modeling Simulation PIN photodiode 3D lmager

作者: Xiangliang Jin Yicheng Zeng

作者单位: Faculty of Material and Photo-Electronic Physics, Xiangtan University, Xiangtan 411105, China

会议类型: 国际会议

会议名称: 2010 International Conference on Measuring Technology and Mechatronics Automation(ICMTMA 2010)(2010年检测技术与机电自动化国际会议)

会议地点: 长沙

会议语种:英文

页码: 3313-3316

在线出版日期: 2010-03-13（万方平台首次上网日期，不代表论文的发表时间）