A High Precision Optical Position Detector Based on Duo-lateral PSD
The development of precision-mechanic challenges the ability of position-detector. A high precision optical position detector is designed with a new type of Position Sensitive Detector (PSD). The new type of PSD based on Duo-lateral effect solves the position detection error (PDE) and non-linearity of normal PSD. The detector is constituted of low-noise JFET operation amplifiers, ADuC812 and LCM. The accuracy of the detector is truly calibrated with an actuator turned by a five phase step motor as the regulator and analyzed with the theory of uncertainty of measurement The result of uncertainty analysis approves that the optical position detector designed based on Duo-lateral PSD is very high-precision with only 1.922urn uncertainty of measurement Additionally, the detector works steadily in the noisy environment and it can suit for the industry application.
Duo-lateral PSD1 optical-position detecing2 actuator3 measurement uncertainty4
Liu Hongfei Xiao Ying Chen Zhong
Department of Physics, Xiamen University, Xiamen, 361005, China
国际会议
重庆
英文
1053-1055
2009-12-25（万方平台首次上网日期，不代表论文的发表时间）