Dynamic Analysis of a No-Coupling and Large Stroke Two-Dimension Micro-Stage
Compliant micro-stage is the key component of the micromanipulator equipments and its dynamic performance can seriously affect the micromanipulators kinematic and positioning accuracy. This paper proposed a two-dimension micro-stage based on bridge type amplification mechanism and U-type parallel guiding mechanism using the nesting structure and right angle flexure hinge. According to the structure characteristic of micro-stage, the dynamic model of one dimension stage is built, the stiffness performance of amplification mechanism is analyzed using the 1/4 model of bridge type amplification mechanism and the stiffness performance of U-type parallel guiding mechanism using the guiding cantilever beam theory. And on those bases, frequency response of the micro-stage can be obtained. Then, an impact experiment is carried out to test the micro-stages frequency response. The effect of supporting mechanism and the sensor mass to the frequency response of the micro-stage, and the error between theory and experiment is analyzed. The experiment results proved the correctness and effectiveness of theory model.
Wei Li Xuefeng Yang Yuqiao Wang Guo Ye
College of mechanical and electrical engineering China University of Mining & Technology Xuzhou 221008,China
国际会议
2009 IEEE International Conference on Robotics and Biomimetics(2009 IEEE 机器人与仿生技术国际会议 ROBIO 2009)
桂林
英文
2168-2171
2009-12-19（万方平台首次上网日期，不代表论文的发表时间）