Boron-doped Nanocrystalline Diamond Films Deposited By Using DC Arc Plasma Jet CVD
Boron-doped micro-nanocrystalline diamond coating may be SUCCESSfully prepared on Mo substrate with DC arc plasmas jet deposition device．Along with the increase of doped-boron concentration in the film．two-point resistance measurement indicates that film resistance presents exponential decrease；Raman spectrum test shows that， the characteristic peak value of diamond 1332cm-1 in the spectrum moves toward low frequency， the semi-height width of diamond peak，peak D and peak G，etc．in the spectrum is expanded，and the component of non-diamond bonds such as sp2，etc．in the film is increased；SEM and AFM observation shows that，increasing the doped-boron concentration could further subdivide the crystal grains in the film，and is beneficial for the growth of nano-or ultra-nano-crystalline diamond film；film annealing test shows that．micro-nanocrystalline diamond film with higher doped-boron concentration has beaer thermal stability than the micro-nanocrystalline diamond film without doped boron．
nanocrystalline diamond DC Arc Plasma Jet CVD boron-doped thermal stability
B.K.Xiang D.W.Zuo X.F.Li F.Xu M.Wang
Jiangsu Key Laboratory of precisionµ-fabrication of Nanjing University of Aeronautics and Astronautics Nanjing 210016 China
国际会议
常州
英文
30-34
2009-11-19（万方平台首次上网日期，不代表论文的发表时间）