Silicon-wires and Compact Multi-mode Interference Splitters with an Uneven Splitting-ratio
We report the fabrication and measurement of silicon-wires and multi-mode interference splitters based on silicon-wires structures. The low propagation loss of 0.71±0.03dB/mm and bending loss of 0.01dB/90° were obtained for silicon-wires. The splitting-ratios of the splitters are respectively 50:50, 15:85, and 28:72. They exhibited low excess loss and exact splitting-ratios.
(230.7370) Waveguides (230.1360) Beam splitters
Jingtao Zhou Huajun Shen Huihui Zhang Xinyu Liu
Institute of Microelectronics of Chinese Academy of Sciences 3 Beitucheng West Road, Chaoyang District, Beijing, PR China
国际会议
上海
英文
1-2
2009-11-01(万方平台首次上网日期,不代表论文的发表时间)