Acceleration detecting using MOEMS ultrahigh Q Microcavities

摘要：

A novel acceleration detecting method using high-Q Microcavities is presented. Induced displacement due to the minute acceleration is monitored through resonant frequency shift of the microtoroid cavity coupled to a fixed coupling waveguide. Placing a piezoresistance on the root of cavity chip cantilever, a multi-ranged micro accelerometer can be designed.

关键词： 280.4788 120.4570

作者: Yingzhan Yan Zhe Ji Baohua Wang Guoqing Jiang Shubin Yan Jijun Xiong

作者单位: National Key Laboratory For Electronic Measurement Technology, North University Of China, Taiyuan, China 030051

会议类型: 国际会议

会议名称: ACP2009亚太光纤通信与光电国际会议

会议地点: 上海

会议语种:英文

页码: 1-2

在线出版日期: 2009-11-01（万方平台首次上网日期，不代表论文的发表时间）