Capacitive Silicon micro-Accelerometers Noise Reduction Technology Research

摘要：

The capacitive silicon micro-accelerometer as an important inertia device,applied in the autocar, consumer electronics, inertial guidance and so on, which has a wide application prospect.Improving the detection accuracy of capacitive accelerometer has been an important research direction,which is the key to reduce the noise, the noise mainly include the mechanical thermal noise and noise of electric circuits. Noise reduction measures were described,for example, the design of sensitive units, highfrequency carrier frequency range selected, the choice of amplifier operation and so on, to reduce noise and improve sensitivity. Through the testing of the effect of noise, the sensitivity is better than the relevant reports.

关键词： capacitive silicon micro-accelerometer signal noise ratio closed-loop control system sensitive unit

作者: WANG Ling LI Yan WANG Dong

作者单位: College of Mechanical & Electrical Engineering Henan Agricultural University Zhengzhou, china

会议类型: 国际会议

会议名称: 2009 Second International Conference on Intelligent Computation Technology and Automation(2009 第二届IEEE智能计算与自动化国际会议 ICICTA 2009)

会议地点: 长沙

会议语种:英文

页码: 553-556

在线出版日期: 2009-10-10（万方平台首次上网日期，不代表论文的发表时间）