Research Status and Development of Magnetically Suspended Rotor Gyroscopes
The suspended rotor gyroscope has a potential advantage of high precision, in addition, it can survey 2 axes of angular rate and 3 axes of acceleration simultaneously. Two kinds of gyroscopes exist, which are electrostatically suspended rotor gyroscopes and magnetically suspended rotor gyroscopes. In this paper, the respective characteristics of various structures, operating principles, fabrication processes and performances of magnetically suspended rotor gyroscope developed in the world are summarized, especially the Magnetically suspended MEMS gyroscopes, are described in detail.
magnetic levitation technology micromachined gyroscope superconducting gyroscope micro-electro-mechanical system (MEMS) component
Gang Xue Tao Li Huaiwu Zhang
State Key Laboratory of Electronic Thin Film and Integrated Devices University of Electronic Science and Technology Chengdu, China
国际会议
成都
英文
373-376
2009-09-25（万方平台首次上网日期，不代表论文的发表时间）