Fabrication of ZnO thin film transistors based on the substrate of glass

摘要：

In our paper, we induced the process of ZnO based thin film transistors (ZnO-TFTs) fabricated on the substrate of glass. The photolithographic plate designed for using in the ZnO-TFT devices fabrication process was shown in our paper. The ZnO-TFT devices were fabricated successfully, the Ion/off ratio is～104.

关键词： Fabrication Photolithography ZnO Thin film transistors

作者: X. Yang J. Cao C.Wang C. Zhao W. Tang X. Gao J.Yang B. Liu X, Qi G. Du

作者单位: Jilin Institute of Architecture and Civil Engineering, Hongqi Street 1129＃, Changchun, Jilin, China Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences Dongnanhu Str Jilin Institute of Architecture and Civil Engineering, Hongqi Street 1129#, Changchun, Jilin, China Northwestern University, USA Dalian University of Technology, China

会议类型: 国际会议

会议名称: 2009 International Symposium on Liquid Crystal Science and Technology(2009国际液晶科技研讨会)

会议地点: 昆明

会议语种:英文

页码: 501-504

在线出版日期: 2009-08-02（万方平台首次上网日期，不代表论文的发表时间）