Numerical Analysis of Dependence on Air Gap Length of Resonant Cavity in Microwave Plasma Source
(0) To excite TM wave selectively and maximize an Ez-field parallel to a plasma density gradient at a plasma surface, a resonant cavity has been formed by providing an air gap between an upper conduction plate with a slot antenna and a dielectric window of a microwave plasma source. The dependence of a plasma density on air gap length L was investigated experimentally and analytically. To explain the reason of the dependency, we had calculated electric fields in the cavity in detail by using a FDTD method. From the results of the FDTD simulation, the approximate equation which gives the optimum air gap length L for maximizing Ez-field has been obtained. And, the reason why the local peak density appeared independently of the resonance has been explained.
microwave plasma resonant cavity FDTD
Yusuke Kudo Shunsuke Morioka Noboru Katayama Sumio Kogoshi
Faculty of Science and Technology, Tokyo University of Science, Chiba 278-8510, Japan
国际会议
The International Conference on Electrical Engineering 2009(2009 电机工程国际会议)
沈阳
英文
1-5
2009-07-05（万方平台首次上网日期，不代表论文的发表时间）