Topology Optimization of a Linear-Motor Actuated Parallel XY Stage

摘要：

The target of the paper is to use topology optimization technique to design an XY stage with high performances serving as a motion module for next generation of semiconductor manufacturing equipments. By experiment and analysis, two components, the thruster and the bridge, are identified as the major infiuencing parts that should be carefully designed. The topology optimization problem is formulated as an optimization problem, where the compliance and natural frequencies are objectives and the material volume is taken as constraints. By the topology optimization and reconstruction technique, an improved prototype of the parallel XY stage was manufactured. The major contribution of the paper is to introduce a topology optimization a mechanical part with respect to performance of the overall mechanical system, instead of the performance of the single mechanical part.

关键词： topology optimization XY stage compliance natural frequency

作者: Jian Shen Yunjiang Lou

作者单位: Division of Control and Mechatronics Engineering,Shenzhen Graduate School,Harbin Institute of Technology,Shenzhen,China

会议类型: 国际会议

会议名称: 2009 IEEE International Conference on Information and Automation(2009年 IEEE信息与自动化国际学术会议)

会议地点: 珠海、澳门

会议语种:英文

页码: 762-767

在线出版日期: 2009-06-22（万方平台首次上网日期，不代表论文的发表时间）