The Study on Photo Mask Pre-alignment Approach Based on Four-Quadrant-Photo-Detectors

摘要：

In this note, an analysis was made on the characteristics of voltage signals from Four-Quadrant-Photo-Detectors (FQPDs) used in photo mask pre-alignment. With this, an algorithm was proposed to compute the photo masks pose offset with respect to FQPDs. In addition, a kinematic model was established for the manipulators movement in pre-alignment. Based on the pose offset calculating algorithm and the kinematic model, a pre-alignment approach was proposed. The validity of the presented pre-alignment approach was illustrated by the performance indexes of time cost in pre-alignments, and repeatiblity of photo masks, which are obtained from experiments.

作者: Yun Liu

作者单位: School of Marine Engineering,Jimei University,Xiamen City,Fujian Province,361021,P. R. China

会议类型: 国际会议

会议名称: 2009 IEEE International Conference on Information and Automation(2009年 IEEE信息与自动化国际学术会议)

会议地点: 珠海、澳门

会议语种:英文

页码: 1279-1284

在线出版日期: 2009-06-22（万方平台首次上网日期，不代表论文的发表时间）