The Signal Interrogation Technology of MEMS Optical Fiber Pressure Sensor

摘要：

This paper describes the Microelectromechanical Systems (MEMS) optical fiber pressure sensor signal interrogation systems. The white-light interferometry system, component test system (CTS) and self-calibrated interferometric intensity based (SCIIB) system are introduced. The signal of the optical fiber pressure sensor processing schemes is presented. With the system the cavity of the MEMS optical fiber pressure sensor is measured with high resolution by fringe analysis. The dynamic range of the measurement is large, which is from several microns to millimeters.

作者: Wang Cong-fei Wang Guang-long Chen Jian-hui Dun Yi

作者单位: Institute of Nanotechnology and Microsystems,College of Mechanical Engineering,Shijiazhuang,Hebei Province,China

会议类型: 国际会议

会议名称: 2009 IEEE International Conference on Information and Automation(2009年 IEEE信息与自动化国际学术会议)

会议地点: 珠海、澳门

会议语种:英文

页码: 1285-1288

在线出版日期: 2009-06-22（万方平台首次上网日期，不代表论文的发表时间）