Bulk-Micromachined Silicon Resonant Accelerometer
A micromechanical silicon resonant accelerometer (SRA) with micro leverage mechanism amplifying the inertial force is presented. SRA consists of a pair of double-ended tuning forks (DETF), a proof mass and a micro lever mechanism. Firstly the relation between frequency shift and applied force of DETF is modeled with the classical Bernoulli- Euler beams theory and then simulated by the finite element analysis (FEA). The conclusion is that analytical analysis results are very close to simulation results. Secondly micro leverage mechanism is presented, and the equations for calculating the amplification factor are derived. The effect of pivot spring and output system constants on the amplification factor is analyzed. According to the analytical results, the SRA is designed and fabricated. Comparison of the obtained experimental results and analytical results shows good agreement.
Anping Qiu Yan Su Xinhua Zhu Qin Shi
Research Center of MEMS Inertial Technology Nanjing University of Science and Technology Nanjing,P.R.Cjina,210094
国际会议
2009 IEEE International Conference on Information and Automation(2009年 IEEE信息与自动化国际学术会议)
珠海、澳门
英文
1289-1292
2009-06-22（万方平台首次上网日期，不代表论文的发表时间）