Design and Realization for High Dynamic Silicon Micromachined Gyroscope

摘要：

This paper reports a design and realization method for the high dynamic silicon micromachined gyroscope. The gyroscope is used in control technology field to measure pose of a rotating carrier with high self-rolling velocity up to 14400°/s. The roll angular velocity, the yawing and pitching angle velocity of the rotating carrier are sensed and outputted by the gyroscope, and the output signal of the gyroscope can be obtained by the signal processing technology which is consisted of hardware circuits, software arithmetic and compensation technique.

关键词： silicon micromachined gyroscope high dynamic sensor signal processing

作者: W. Zhang Q.W. Yan F.X. Zhang

作者单位: Research Centre of Sensor Technology,Beijing Information Science and Technology University,Beijing,1 School of Electronic and Engineering, Beijing University of Posts and Telecommunications, Beijing, 1 Research Centre of Sensor Technology, Beijing Information Science and Technology University, Beijing

会议类型: 国际会议

会议名称: 2009 IEEE International Conference on Information and Automation(2009年 IEEE信息与自动化国际学术会议)

会议地点: 珠海、澳门

会议语种:英文

页码: 1293-1297

在线出版日期: 2009-06-22（万方平台首次上网日期，不代表论文的发表时间）