A High Performance Vibration Sensor with Extended Floating Gate

摘要：

A novel CMOS vibration sensor with extended floating gate is developed with simple circuitry to realize high sensitivity, linearity, and manufacturability. A method to enhance linearity by varying capacitance coupling coefficient relative to total capacitance is proposed. The sensor can maintain linearity in a large displacement range and its measurement range also greatly increases (up to ±33g). The sensor can achieve a resolution of 0.05g, obtained by ANSYS and HSPICE simulations. HSPICE models for time varying capacitance and floating gate are also proposed. The sensor has ultra low power consumption of only 824.3 μW and may be able to operate with a single coin cell battery.

关键词： Linearity Extended gate Vibration sensor

作者: F Benxian Peng Ting Yu Fengqi Yu Yuchun Feng

作者单位: Department of Integrated Electronics,Shenzhen Institute of Advanced Technology,Chinese Academy of Sc College of Optoelectronic Engineering,Shenzhen University,Shenzhen,518067,China

会议类型: 国际会议

会议名称: 2009 IEEE International Conference on Information and Automation(2009年 IEEE信息与自动化国际学术会议)

会议地点: 珠海、澳门

会议语种:英文

页码: 1608-1612

在线出版日期: 2009-06-22（万方平台首次上网日期，不代表论文的发表时间）