Investigation on Wear- and Corrosion Resistance of TiN films by CVD
TiN films have been deposited on K211 super alloy substrates by chemical vapor deposition (CVD) using a gaseous mixture of TiCl4, NH3, and Ar as carrier gas between 400 and 700℃. The films were characterized by means of scanning electron microscopy and energy dispersive spectrometer. In this paper, the wear and corrosion resistance of TiN coatings have been investigated by abrasive experiments and corrosion tests. It was shown that coated samples demonstrated significantly higher wear resistance than those uncoated by weight loss measurements in the test procedure. Under the conditions of the corrosion experiments, substrates with TiN coatings showed better corrosion resistance than uncoated samples and stainless steel.
Films Titanium Nitride Wear Resistance Corrosion Resistance Chemical Vapor Deposition
Chao WANG Chungen ZHOU
School of Materials Science and Engineering, Beijing University of Aeronautics and Astronautics,Beijing 100083, China
国际会议
重庆
英文
554-558
2008-06-09（万方平台首次上网日期，不代表论文的发表时间）