Research of a Novel MEMS Vector Hydrophone Based on a New Package Process
A new method for the MEMS die package process was reported. Using the method of bionic package, a novel MEMS vector hydrophone was fabricated from a typical mass-beam accelerometer structure. According to the auditory principle of fishs lateral line and its natures fundamental acoustic sensors-stereocilia, a rigidity cylinder was fixed on the center of the mass as a stereocilia, and the sensitivity structure of the hydrophone was obtained. By means of a specific package process, the sensor was fabricated properly for the underwater sound detection application. From the test results of the sensor, we can see that, this vector hydrophone has a receiving sensitivity of -165dB (0dB=1V/μPa, the amplification factor of the preamplifier is 100.) and a good directional pattern in form of “8-shape. The hydrophone can work well under the maximum pressure of 2MPa.
Packaging Vector Hydrophone Bionic Package Test MEMS Accelerometer
Kairui ZHANG Qiuzhu LI Guowen LIU Xiaojun SHI
National Key Laboratory for Electronic Measurement Technology, North University of China, Taiyuan, S Jinxi Machinery Industries Group, Taiyuan, Shanxi, 030027, CHINA
国际会议
重庆
英文
567-572
2008-06-09（万方平台首次上网日期，不代表论文的发表时间）