A THERMAL ACTUATOR DESIGN FOR A SAFE AND ARMING MEMS INTERRUPTER
This paper presents an electro-thermal actuator design for a safe and arming interrupter. The actuator consists of two hot arms thermal pseudobimorph actuator that relies on differential expansion of a cold and hot arm to cause it to bend in-plane. The main advantages of thermal actuators are that they exhibit larger displacements and forces than electrostatic or piezoelectric actuators and that their thermal expansion is linearly related to the applied heat. Heat is generated in accordance with the Lenz-Joule law by applying an electric current that flows through the device. Nickel is selected for the thermal actuator due to its relatively high electrical resistivity, low thermal conductivity and high thermal expansion coefficient. Electroplated nickel process is compatible with the UV-LIGA that is employed to fabricate S&a interrupter. The thermal actuator can be fabricated by a MEMS process based on a SOI wafer and then be assembled with the S&A interrupter.
NIE Wei-rong XI Zhan-wen WANG Shao-wei
School of Mechanical Engineering, Nanjing University of Science and Technology 200#, Xiaolingwei, Nanjing, 210094, China
国际会议
25th International Symposium on Ballistics(第25届国际弹道会议)
北京
英文
911-917
2010-05-17（万方平台首次上网日期，不代表论文的发表时间）