Preparation and Properties of a Few Kinds of Sulfonium Salt Photoacid Generators
Sulfonium salt is a widely used type of photoacid generator (PAG) in chemically amplified photoresists because of their high photoacid generating efficiency and thermal stability. In this paper, a series of sulfonium salts were prepared by a convenient method. Several different phenolic compounds were reacted with dimethyl sulfoxide in the presence of hydrogen chloride to give the sulfonium salt products. The properties of the sulfonium salts, including solubility in organic solvents, thermal decomposition temperatures, UV absorption and photolysis, were investigated. The quantum yields of the PAGs were detected at the range of 0.2-0.7 by using a low pressure Hg lamp as exposure tool.
photoacid generator photoresist sulfonium salt ptotolysis quantum yield
Juan Liu Zheng Wang Liyuan Wang
College of Chemistry, Beijing Normal University Beijing ,P.R.China College of Chemistry, Beijing Normal University Beijing ,P.R.China
国际会议
The 31st International Congress on Imaging Science(第31届国际影像科学大会 ICIS2010)
北京
英文
714-717
2010-05-12（万方平台首次上网日期，不代表论文的发表时间）