ALUMINA COATED AMORPHOUS SILICON FILM AS THE ANODE FOR LITHIUM ION BATTERY
Amorphous silicon (a-Si) thin film has been deposited on titanium substrates by radio frequency (rf) magnetron sputtering and studied as anode for lithium ion batteries. The thickness of the silicon film was 500 nm. Al2O3 films with thickness of 2-4 nm were deposited on the surface of a-Si film by atomic layer deposition (ALD) system. It is found that 2nm Al2O3 coating can enhance the cycle life and columbic efficiency but 4 nm Al2O3 film impedes the lithium diffusion. Cycled electrodes were investigated by SEM. The a-Si films with or without Al2O3 coating show significant cracking after cycling.
YU HE XIQIAN YU YANHONG WANG HONG LI XUEJIE HUANG
Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China
国际会议
The 12th Asian Conference on Solid State Ionics(第十二届亚洲固态离子学会议暨第十五届中国固态离子学会议)
武汉
英文
537-542
2010-05-02(万方平台首次上网日期,不代表论文的发表时间)