Research on Micro Electrode Fabrication Based on ECM
Micro electrode fabrication is one of the key technologies in micro electric machining field. This paper presents an improved method to fabricate micro electrode based on electrochemical machining (ECM). At first, an auxiliary hole is machined in a piece of thin metal plate with a nickel wire as cathode, then by reversing the polarity of machining power, the nickel wire is processed as anode in the auxiliary hole and become thinner. Based on the analysis of numerical simulation of electrical field distribution in ECM machining process, the machining parameters that affect the shape and the diameter of micro electrode were discussed, and machining technique was optimized. Experiments were carried on, and a nickel micro electrode of 11 μm diameter and 600 μm length was obtained. In the same electrochemical cell, micro array holes of 60 μm diameter were in situ machined on a piece of 100 μm thickness nickel plate by applying a fabricated micro-electrode of 19 μM diameter as cathode in ECM process.
Micro electrode In situ Fabrication ECM
Xiaoyu Ma Yong Li
Institute of Manufacturing Engineering/State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China
国际会议
The 16th International Symposium on Electromachining(第16届国际电加工会议)
上海
英文
331-334
2010-04-19（万方平台首次上网日期，不代表论文的发表时间）