Research on Micro ECM Using Micro Array Electrode
A micro electrochemical machining (ECM) process is proposed for better machining performance by taking the integrated technical measures including array micro electrode and its side insulation, micro gap control between the cathode and anode, as well as control of the retraction of electrode synchronized with switching off of pulsed current supply intermittently in process etc. The array micro electrode is fabricated by LIGa process and then insulated with epoxy film by spincoating process. A micro ECM setup is designed for the machining experiments, in which a moving coil actuator is used as the fast servo unit for micro gap control. Through theoretical and experimental works for process improvement, machining results of 11×11 array micro holes have been obtained. By using the side-insulated array electrodes with epoxy film of 5～8 μm thickness, added by micro gap control, the hole diameter and taper are significantly reduced.
Micro ECM Array electrode Side-insulation Machining gap Electrolytic products Intermittent retraction
Yong Li Xiaoyu Ma Gaihong Liu Manhong Hu Futing Yi
Institute of Manufacturing Engineering/State Key Laboratory of Tribology, Tsinghua University, Beiji Institute of High Energy Science, Chinese Science Academy, Beijing, China
国际会议
The 16th International Symposium on Electromachining(第16届国际电加工会议)
上海
英文
335-339
2010-04-19（万方平台首次上网日期，不代表论文的发表时间）