Electrochemical Machining of Micro-profile on Copper

摘要：

Electrochemical machining is used for micromachining. To use copper as a conductive material in microchips it requires fabrication of micro-channels in very thin copper foil, which urgently needs a lot of investigation. In this study influence and behaviour of electrolyte concentrations, pulse amplitude, pulse frequency, duty ratio and micro-tool feed rate on accuracy of the micro-channel is investigated through well planed experimental design. It is found from the study that for micro profile generation micro-tool feed rate and electrolyte concentration are the most influencing parameters. Developed regression equations can be utilized for searching out best parametric combination for achieving different design requirements during electrochemical micromachining (EMM).

关键词： EMM Micro-channel Regression analysis

作者: M. Malapati A. Sarkar B. Bhattacharyya

作者单位: Production Engineering Department, Jadavpur University, Kolkata -700032, India

会议类型: 国际会议

会议名称: The 16th International Symposium on Electromachining(第16届国际电加工会议)

会议地点: 上海

会议语种:英文

页码: 393-398

在线出版日期: 2010-04-19（万方平台首次上网日期，不代表论文的发表时间）