A Hybrid Process of Micro EDM and Micro ECM for 3D Micro Structures

摘要：

A hybrid process of Micro EDM and Micro ECM for 3d micro structures is proposed and investigated experimentally. It integrates Micro EDM and Micro ECM on one equipment setup. Among that, 3D servo scanning Micro EDM is used to remove most part of workpiece material with fast machining speed, and Micro ECM milling is to remove the residual material and to form the finished structure surface. In machining experiments, a square column structure with size of 410×406×181 μm3 was machined by the hybrid process. The MMRs of Micro EDM and Micro ECM are 31 182 μm3/s and 11 017 μm3/s. The experimental results demonstrate that the hybrid process has combined advantages of high machining efficiency of servo scanning Micro EDM and good surface quality of Micro ECM milling.

关键词： Hybrid Process 3D Micro Structure Servo Scanning Micro EDM Micro ECM Milling Side-insulated electrode

作者: Manhong Hu Yong Li Hao Tong Xiaoyu Ma

作者单位: Institute of Manufacturing Engineering/State Key Laboratory of Tribology, Tsinghua University, Beijing, 100084, China

会议类型: 国际会议

会议名称: The 16th International Symposium on Electromachining(第16届国际电加工会议)

会议地点: 上海

会议语种:英文

页码: 507-511

在线出版日期: 2010-04-19（万方平台首次上网日期，不代表论文的发表时间）