Implementation of Micro-EDM Process for Machining of Nonconductive Ceramics
Ceramic materials are, due to their extraordinary properties such as high hardness and biocompatibility, increasingly used in micro parts. In research, the electro discharge machining of nonconductive ceramic materials using an electrically conducting starting layer ( assisting electrode)has been successfully adapted to ZrO2 ceramics. In the current study, tests are carried out to determine the minimum feature size of micro structures and the influences of vibration superposition on the outcome and process speed. Optimized parameter settings are leading to a more stable and faster micro-EDM of nonconductive industrial grade ZrO2 ceramic material. Thus, aspect ratios of 5 for micro bores with diameters of less than 200 μm can be realized and pole structures of 50 μm width and aspect ratio of 10 could be obtained.
Micro electrical discharge machining Ceramic zirconium diozide Assisting electrode Vibration
Andreas Schubert Henning Zeidler
Chair Micro-manufacturing Technologies, Chemnitz University of Technology, Reichenhainer Str. 70, Ch Chair Micro-manufacturing Technologies, Chemnitz University of Technology, Reichenhainer Str. 70, Ch
国际会议
The 16th International Symposium on Electromachining(第16届国际电加工会议)
上海
英文
565-569
2010-04-19（万方平台首次上网日期，不代表论文的发表时间）