A New Micromachining Method Based on Micro EDM for Fabrication of Micro Structures
A new micromachining method based on micro EDM for fabrication of micro structures was proposed. This method combines micro EDM deposition with selective removal process in one EDM system. The deposition conditions were researched and some deposition strategies including serial deposition of single cylinder, sub-deposition and deposition layer-bylayer and so on were performed. Some typical microstructures by EDM deposition were obtained. The transformation of machining procedure from EDM deposition to selective removal was introduced. Micro-structures with high shape accuracy by using the new micromachining method were obtained. Finally, the fine texture characteristics of the deposited brass materials were tested.
Electrical Discharge Machining (EDM) Micromachining Micro EDM deposition Micro 3D structures
Zilong Peng Zhenlong Wang Guanxin Chi
Key Laboratory of Micro-Systems and Micro-Structures Manufacturing (Harbin Institute of Technology), School of Mechatronics Engineering, Harbin Institute of Technology, Harbin, 150001, China
国际会议
The 16th International Symposium on Electromachining(第16届国际电加工会议)
上海
英文
583-586
2010-04-19（万方平台首次上网日期，不代表论文的发表时间）