Grid and substrate bias effects on mechanical properties of diamond films prepared by HFCVD

摘要：

Diamond films were prepared at different grid bias and substrate bias in hot filament chemical vapor deposition (HFCVD) system. The Raman and SEM results show that grain size decreases and non-diamond impurities increase for applying grid and substrate bias currents. The defects and impurities in the filM increase with the decrease of grain size, which causes the decrease of hardness and elastic modulus of diamond films. The fracture toughness of filM increases because of the grain size effects by applying bias. The grid bias and substrate bias make the friction coefficient smaller because of the smaller grain size and lubricating effect of graphite in the film. But the excessively high substrate bias current will lead to the dramatic decrease of mechanical properties of CVD diamond as a lot of nondiamond impurities appear in the film.

关键词： HFCVD diamond film grid bias substrate bias mechanical properties

作者: XU Feng ZUO Dun-wen LU Wen-zhuang ZHU Yong-wei WANG Min

作者单位: College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics

会议类型: 国际会议

会议名称: 2009 Frontier Symposium of China Postductors on Materrials Science(2009年中国博士后材料科学前言论坛)

会议地点: 长沙

会议语种:英文

页码: 722-726

在线出版日期: 2009-11-22（万方平台首次上网日期，不代表论文的发表时间）