Preliminary Investigation on a Sheet Plasma Produced by a Single Hot-Filament Cathode Discharge
A sheet plasma is generated by a mesh anode and a single hot-filament cathode with a DC power supply, and its characteristics are experimentally investigated. The sheet plasma is observed to locate around the anode. Both electron density and electron temperature derived from the average energy of the energetic electrons in nitrogen are estimated to be 108 cm-3 and 20～40 eV, respectively, using the optical emission spectroscopy (OES) method based on a kinetic model of low-pressure nitrogen discharge. The electron density, electron temperature and their spatial distributions are found to be affected by the supplying voltage on the anode(70 V to 300 V), filament temperature (600℃ to 780℃) and gas pressure (2 Pa to 20 Pa). By adjusting these parameters the discharge status can be easily controlled.
hot-filament cathode anode voltage filament temperature pressure electron density electron temperature
FENG Zhe GUO Zhigang PU Yikang ZHANG Xiaozhang
Department of Engineering Physics, Tsinghua University, Beijing 100084, China
国际会议
西安
英文
304-309
2009-10-26（万方平台首次上网日期，不代表论文的发表时间）