Langmuir Probe and Optical Emission Spectroscopy Studies of Low-Pressure Gas Mizture of CO2 and N2
Optical emission spectroscopy was used to study a gas mixture glow discharge of CO2 and N2 at a total pressure of 1.2 Torr, a power of 100 W and a flow of 16.5 L/min. The emission bands were measured in the wavelength range of 200 nm to 900 nm. The principal species observed were O2+ (A2∏u → X2∏g), CO+ (A2∏ → X2∑), N2+ (B2∑u+ → X2∑g+), CO2+ (A2∏ → X2∏), N2(C3∏u → B3∏g), O2(b1∑g+ → X3∑g-), and CO (a3e → a3∏). The behavior of the band intensities as a function of the N2 percentage is consistent with recent Monte Carlo simulations. The electron temperature and ion density were determined by a double Langmuir probe. The electron temperature was found in the range of 1.55 eV to 2.93 eV, and the electron concentration in the order of 1010 cm-3. The electron temperature and ion density at pure N2 and pure CO2 agree with previous measurements.
optical emission spectroscopy glow discharge electron temperature CO2 N2
E. F. MENDEZ-MARTINEZ P. G. REYES D. OSORIO-GONZALEZ F. CASTILLO H. MARTINEZ
Faculty of Sciences, Autonomous University of the State of Mexico, State of Mexico, Mexico Institute of Nuclear Sciences, Autonomous National University of Mexico, Mexico D. F., Mexico Institute of Physical Sciences, Autonomous National University of Mexico, 62210, Cuernavaca, Morelos
国际会议
西安
英文
314-319
2009-10-26(万方平台首次上网日期,不代表论文的发表时间)