Ultraprecision Nanomechanics Testing Platform Based on Piezoelectric Actuation

摘要：

This paper presents a kind of structure of in-situ nano-indentation and scratch testing system. Nanoinden-tation testing can be carried out with high resolution in the direction Z which was driven by multi-layer piezoelectric actuator. Components, principle and performance of the system were introduced. After those, calibration experiments of the sensors and indentation experiment of a kind of glass were done, which showed that the sensors had high linearity and the test scheme and device were feasible respectively. Theoretic significance and practical value of that work will promote the nanomechanics research in the area of microelectromechanical system, semiconductor industry, integrated circuit, bionics and biomechanics, etc.

关键词： Nanoindentation Nanoscratch Piezoelectric actuator Force Displacement

作者: Huang Hu Zhao Hongwei Yao Jinjiu Ma Zhichao Liu Binchun Fu Yang

作者单位: School of Mechanical Science & Engineering,Jilin University, Renmin Street 5988,Changchun,Jilin 1300 School of Mechanical Science & Engineering,Jilin niversity,Renmin Street 5988, Changchun, Jilin 1300 School of Mechanical Science & Engineering, Jilin University, Renmin Street 5988, Changchun, Jilin 1 School of Mechanical Science & Engineering, Jilin University,Renmin Street 5988,Changchun, Jilin 130 The aeronautical university of the China People Liberation airforce, Changchun, Jilin 130025, P. R. School of Mechanical Science & Engineering, Jilin University, Renmin Street 5988, Changchun,Jilin 13

会议类型: 国际会议

会议名称: The 2009 International Conference on Advances in Construction Machinery and Vehicle Engineering(2009年工程机械与车辆工程新进展国际学术会议 ICACMVE09)

会议地点: 长春

会议语种:英文

页码: 68-71

在线出版日期: 2009-08-21（万方平台首次上网日期，不代表论文的发表时间）