Global Optimization in Inverse Problem of Scatterometry

摘要：

In the current work, we consider the inverse probleM of scatterometry which consists in determining the shape of a diffracting feature from an experimental ellipsometric signature. The reformulation of the given nonlinear identification problem was considered as a parametric optimization problem using the Least Square criterion. In this work, a design procedure for global robust optimization is developed using Kriging and global optimization approaches. Robustness is determined by the Kriging model to reduce the number of real functional calculations of Least Square criterion. The technical of the global optimization methods is adopted to determine the global robust optimum of a surrogate model.

关键词： Inverse problem in scatterometry Kriging Global Optimization

作者: Lekbir Afraites Jerome Hazart Patrick Schiavone

作者单位: Ecole Nationale des Sciences Appliquees, Safi, UniversitS Cadi Ayyad, Maroc CEA-LETI-DOPT-SINA, 17 Avenue des Martyrs, 38054 Grenoble Cedex France Laboratoire des Technologies de la Microelectronique CNRS, 17 rue des Martyrs,38054 Grenoble, Franc

会议类型: 国际会议

会议名称: The First World Congress on Global Optimization in Engineering & Science(第一届工程与科学全局优化国际会议 WCGO2009)

会议地点: 长沙

会议语种:英文

页码: 107-114

在线出版日期: 2009-06-01（万方平台首次上网日期，不代表论文的发表时间）