Flying Height Measurement of Magnetic Disk Using Double Common-path Heterodyne Interferometer

摘要：

The magnetic storage capacity depends significantly on the area density, which is close related to the flying-height (FH) of magnetic head. In this paper a double common-path heterodyne interferometer is proposed to measure the FH. The resolution of Fh measurement reaches 0.1nm by means of phase measurement method. The influence of vibration of magnetic disk and work table is considered in the configuration design so as to reduce the systeM error. The experimental results show that the error compensation is better than 10nm when the vibration of disk is 1.2μm.

作者: D J Lin Z Y Yue N H Song Y G Meng C Y Yin

作者单位: State Key Laboratory of Precision Measurement Technology and Instruments,Tsinghua University, Beijin State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China

会议类型: 国际会议

会议名称: 第四届仪器科学与技术国际会议( 4th International Symposium on Instrumentation and Science and Tcchnology)

会议地点: 哈尔滨

会议语种:英文

页码: 750-754

在线出版日期: 2006-08-08（万方平台首次上网日期，不代表论文的发表时间）