Developed of a Multi-Degree of Freedoms Measuring System and an Error Compensation Technique for Machine Tools

摘要：

In this paper, a new measuring system, Multi-Degree of Freedoms Measuring Systcm(MDFMS), is presented. It is integrated a miniature laser interferometer with a DVD pickup and straightness measuring optical system. The five-degrees of freedoms motion errors to simultaneously measure machine tools. And, it reduces the overall time for measuring the geometric errors. The resolution and accuracy of straightness measurement are about 0.3μm and the resolution and accuracy of the angular error measurement are about 0.6arcsecs within the measuring range of 150mm. MDFMS is characteristic by simple set up, low cost, fast measuring and high accuracy for machine tools.

作者: Wen-Yuh Jywe Chien-Hung Liu W. H. Shien Lih-Horng Shyu Te-Hua Fang Yung-Hoh Sheu Tung-Hui Hsu Chi-Chen Hsieh

作者单位: Institute of Mechanical and Electro-Mechanical Engineering, National Formosa University, Taiwan, Chi Graduate Institute of Electro-Optical and Materials Science, National Formosa University, Taiwan, Ch Department of Computer Science and Information Engineering, National Formosa University, Yunlin, Tai Department of Mechanical Engineering, National Chung-Cheng University, Chiayi,Taiwan, China, 621

会议类型: 国际会议

会议名称: 第四届仪器科学与技术国际会议( 4th International Symposium on Instrumentation and Science and Tcchnology)

会议地点: 哈尔滨

会议语种:英文

页码: 761-765

在线出版日期: 2006-08-08（万方平台首次上网日期，不代表论文的发表时间）