Study on Writing Transmission Metal Grating with Pulse Shaping of Femtosecond Laser
Pulse shaping in femtosecond(fs) laser micromachining is different from that of traditional laser, whose main purpose is to reduce focal scale size, wipe off fluorescence around laser beam, decrease pulse distortion, and fabricate all kinds of figures. To describe the spatial form of laser pulse around focal scale, the synchronous moving of focal objective and accepting material is presented. When a pinhole mask is placed in front of focal objective, the changing trend of laser spatial form around focal point with the laser beam diameter will be obtained by the diameter changing of the hole mask. Experimental results show that the diameter of laser pulse around focal point trends smoothly when the pinhole diameter is modulated to smaller, even the position of beaM waist is changed. These phenomena can be explained by optical imaging theory. Finally, the transmission metal grating is written successfully with a selected parameter.
X C Ni Q Sun Ch Y Wang L Yang Y Z Wu W Jia L Chai
Electronic Engineering Department, Tianjin University of Technology and Education,300222 Tianjin, Ch Key Laboratory of Optoelectronic Information Technical Science, EMC, Ultrafast Laser Laboratory, Sch
国际会议
第四届仪器科学与技术国际会议( 4th International Symposium on Instrumentation and Science and Tcchnology)
哈尔滨
英文
1011-1016
2006-08-08（万方平台首次上网日期，不代表论文的发表时间）